| 摘要 |
PURPOSE:To increase the stability and lifetime of discharge by a method wherein the end surface whereat the cylindrical metal as the anode has an aperture into the main body and a part of the internal surface of the cylinder which is continuous thereto are coated with noble metal, in a gas laser tube wherein the anode serves also as an exhaust tube. CONSTITUTION:The noble metallic layer 13 is that which mediates indium 14 acting as the cushion at the time of adhesion of the anode and exhaust tube 1 into the main body of the gas laser tube 2, and it is preferable to use Au, Pt, Pd, etc. which are stable even for the active gas such as oxygen. The noble metallic layer 12 is due to film formation by sputtering or ion-plating onto one end surface of the anode base body 11 made of an iron cylindrical metal and the surface of the discharge part composed of the internal surface of the cylinder which is continuous thereto, and the noble metal of the same kind as in the noble metallic layer 13 is used for it. The discharge area is wider, compared with the bar or projection anode, and then stable discharge can be obtained by being enabled to sufficiently correspond even to overcurrents and without the generation of defective conditions accompanied with the increase of temperature. |
