| 摘要 |
PURPOSE:To make a transducer smaller in size and to realize the air-tightness between component parts, by removing partly a conductive layer formed on the surface of an insulation base board in order to form an electrode and a supporting layer surrounding the electrode. CONSTITUTION:An electrode 1 and a supporting ring 13 are formed by photoetching a layer 21 of a both-side printed circuit board 23, which is made by adhering conductive layers 21 and 22 on the upper and lower surfaces of an insulation base board 12, and an output electrode 16 and earth electrode 17 are formed by photoetching the layer 22. At the edge of the supporting ring 13, an oscillation film 6 composed of an insulation film 14 and conductive thin film 15 is stretched in front of a fixed electrode 3 with a specified interval. the output electrode 16 is connected to the fixed electrode 3 with a conductive adhesive 19 injected in a through hole 18 which penetrates the fixed electrode 3, insulation base board 12 and output electrode 16. |
