| 摘要 |
PURPOSE:To make the construction of an output part simpler and to secure a leading, by providing a through hole for an insulation substrate, and by connecting electrically an electrode or a supporting layer on the insulation substrate to an external output electrode by filling a conductive adhesive in the through hole. CONSTITUTION:A fixed electrode 3 consisting of an electrode 1 and a high polymer conductive layer 2, and a conductive supporting ring 13 are formed on the upper surface of an insulation substrate 12. The thickness of the ring 13 is formed thicker than that of the electrode 3, and its edge is stretched with a film 15 of an oscillation film 6 consisting of an insulation film 14 and conductive thin film 15 so that it contacts with the ring 13. An output electrode 16 and earth electrode 17 which surrounds the electrode 16 are formed on the lower surface of the base board 12. The electrode 16 is connected to the electrode 3 with a conductive adhesive 19 filled in a through hole 18 which penetrates the base board 12 and electrode 16, and the electrode 17 is connected to the ring 13 with the adhesive 19 filled in a through hole 24. |
