| 摘要 |
PURPOSE:To shorten the rising time of gas laser output and eliminate fluctuation of gas laser output due to fluctuation of environmental temperature by providing a gas reservoir temperature control apparatus which makes temperature of gas reservoir equal to the temperature of discharge space. CONSTITUTION:The gas reservoir of hermetically sealed laser tube 2 is connected to discharge space in the tube through the connecting tube 3. Therefore, pressure in this system is always equal. In the not discharging condition, temperature of laser tube as a whole is equal and therefore density of particles is uniform and relation no/Vo= nds/Vd=nro/Vr can be obtained. (In this equation, no, ndo, nro are number of particles in the laser tube, discharge space and gas reservoir; Vo, Vd, Vr are volumes of laser tube, discharge space, gas reservoir.) On the other hand, in the discharging condition, temperature of discharging space rises and particle density is expressed as nd1/Vd=(nr1/ Vr)X(Tr1/Td1). (In this equation, nd1, nr1 are particle densities in the discharge space and gas reservoir during discharging; Td1, Tr1 are temperatures of discharge space and gas reservoir during discharging). Here, temperature Td1 is controlled to become equal to Tr1 using the gas reservoir temperature control apparatus. Therefore, nd1/Vd= nr1/Vr=no/Vo. Namely, particle density is always made equal and therefore rising time of laser output can be shortened and laser output fluctuation can be eliminated. |
