| 摘要 |
PURPOSE:To prevent the wear due to the contact between a tube 1 and a boat and the generation of foreign matters produced thereby by a method wherein the boat loaded with wafers is inserted to the quartz tube or drawn out via spherical balls. CONSTITUTION:When the boat 2 loaded with the wafers 3 is inserted to the tube 1 provided in an electric furnace, each ball 8 in grooves A-B and C-D transfers respectively through the grooves A and D from the front side of the tube E toward the back side of the tube F while rotating. Each ball of the back side of the grooves A and D respectively moves to the grooves B and C and transfers to the front direction while rotating. Besides, each ball of the front side of the grooves B and C respectively transfers smoothly from the groove B to the groove A, and from the groove C to the groove D. Therefore, each ball successively transfers while circulating and rotating through the grooves, according to the insertion of the boat 2. On the contrary, when the boat 2 is drawn out from the tube 1, each ball performs movements in the direction opposite to the above. As a result of the above, since each ball can rotate smoothly at the time of inserting and drawing out the boat 2, the friction of the boat is converted from sliding friction into rolling friction, and accordingly the transfer of the boat turns extremely smoothly. |
