DEVICE FOR VAPOR GROWTH,申请号JP19820091197-传众专利搜索

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发明名称	DEVICE FOR VAPOR GROWTH
摘要
申请公布号	JPS58207941(A)	申请公布日期	1983.12.03
申请号	JP19820091197	申请日期	1982.05.31
申请人	HITACHI SEISAKUSHO KK	发明人	INOUE HIRONORI;AOYAMA TAKASHI;SUZUKI TAKAYA
分类号	C30B25/16;B01J19/00;C23C16/52;C30B25/02;H01L21/02	主分类号	C30B25/16
代理机构		代理人
主权项
地址

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