发明名称 CONVEYANCE SYSTEM
摘要 PURPOSE:To improve workability by collectively discharging bodies to be processed at fixed timing without limiting the supply of the bodies, minimizing the time required for discharge and sharing the bodies to be processed which are supplied and discharged by a line of one row. CONSTITUTION:The bodies to be processed are each supplied and discharged interlocked with an assembler by supply and discharge mechanisms 11. The bodies to be processed before and behind treatment are stored temporarily by a buffer mechanism, and the timing of supply and discharge is controlled by a control unit 13. The bodies to be processed are discharged collectively at fixed timing without limiting the supply of the bodies to be processed through the control of the control unit 13 to minimize the time required for discharge. The bodies to be processed which are supplied and the bodies to be processed which are discharged are shared by a line of one row.
申请公布号 JPS58206132(A) 申请公布日期 1983.12.01
申请号 JP19820088865 申请日期 1982.05.27
申请人 TOKYO SHIBAURA DENKI KK 发明人 MUTOU TAKEO;SAITOU TAKAYOSHI;MASUDA MASUMI;HIRASE KIYOTO
分类号 H01L21/677;H01L21/50;H01L21/58;H01L21/60 主分类号 H01L21/677
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