摘要 |
<p>A cathode having a layer structure in which alternate layers consisting essentially of emitter material (2) and base material (1) are provided at an oblique angle to the cathodes's macroscopic emitting surface. In a preferred embodiment the surface has a microscopically stepped structure formed by ends of the base material layers and portions of the emitter material layers coating the ends. In an alternative embodiment the surface is not stepped but is formed by a polycrystalline or a preferentially oriented polycrystalline coating layer which is provided on the succession of beveled layers. The succession of layers is manufactured by alternating depositions from the gaseous phase and by subsequent bevel grinding of the layers. The polycrystalline coating layer is provided by deposition from the gaseous phase. The stepped surface is formed, for example, by selective structure etching after the bevel grind.</p> |