| 摘要 |
PURPOSE:To enable the precise detection of an angular deviation, by increasing or decreasing the light-reception area of a photoelectric conversion element in accordance with a change in the incident angle of parallel rays to a light-intercepting grid, and by detecting the angular deviation of the incident angle from a change in an output of the photoelectric conversion element. CONSTITUTION:Parallel rays are made to enter from the upper-end opening of the main body 4 of a thick and cylindrical device. The output of a photoelectric conversion element 6 for detection provided at the lower-end opening of the main body 4 fluctuates according to changes in the incident angle of the parallel rays and the intensity of a light source. On the other hand, the output of a photoelectric conversion element 7 for comparison provided in the outer peripheral part of the main body 4 is not affected by the incident angle of the parallel rays, but fluctuates only according to the change in the intensity of the light source. In addition, a detection amplifier of the photoelectric conversion element 6 for detection, a comparison amplifier of the photoelectric conversion element 7 for comparison, and a subtractor 10 performing the subtraction processing of both outputs of the elements 6 and 7 amplified by the amplifiers 8 and 9 are provided. |
