FORMATION OF DOUBLE-LAYERED THIN FILM BY SPUTTERING,申请号JP19820088611-传众专利搜索

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发明名称	FORMATION OF DOUBLE-LAYERED THIN FILM BY SPUTTERING
摘要
申请公布号	JPS58204032(A)	申请公布日期	1983.11.28
申请号	JP19820088611	申请日期	1982.05.25
申请人	KAMAYA KAGAKU KOGYO KK	发明人	TAOKA FUMIO
分类号	C23C14/06;C08J7/04;C23C14/20;C23C14/38	主分类号	C23C14/06
代理机构		代理人
主权项
地址

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