| 摘要 |
PURPOSE:To perform drawing with high accuracy despite the generation of the revolving variance of a revolving stage and to increase a drawing speed, by detecting the revolving speed of the rotary stage, then feeding this detecting information back to an electronic optical lens barrel. CONSTITUTION:An X-Y table 9 is set in a sample room 1, and a rotary stage 10 is put on the table 9. Then a rotary disk (sample) 11 such as a digital-audio disk, etc. is put on the stage 10. The revolving speed of the stage 10 is obtained from the detecting information detected by a measuring optical system 13, and this revolving speed is fed back to a blanking deflector 3 of an electronic-optical lens barrel 6. As a result, the highly accurate exposure is ensured for the disk 11 despite a revolving error of the stage 10. |
