| 摘要 |
PURPOSE:To enable the positioning of semicondutor pellets independently of the dimensions of the semiconductor pellet by utilizing a positional correction piece having a correction part which is cut at a right angle. CONSTITUTION:The positional correction piece 1 has the correction part 2 at the top end part. The correction part 2 is so cut that the angle of aperture between two adjacent sides 2a and 2b becomes at a right angle. A moving table whereon the positional correction piece 1 is loaded is fixed on a base table 3, and can be moved in two dimensions in the directions X and Y by functions of e.g. fixed rails 4 and 5, an X directional moving plate 6, fixed rails 7 and 8, and a Y directional moving plate 9. The X directional moving plate 6 and the Y directional moving plate 9 are driven by pulse motors 12 and 13. The positioning is so performed that two sides of the semiconductor pellet 16 on a support body 17 contact the two sides 2a and 2b of the cut part 2 of the positional correction piece 1, and then the drive device is controlled so as to stop at the point of reaching the fixed position thereof. |
