| 摘要 |
PROBLEM TO BE SOLVED: To provide a wiring structure which does not require to open a hole for cabling through a barrier wall when an electric signal is transmitted from one space to another space partitioned by the barrier wall. SOLUTION: A through-hole 27 is made in a barrier wall 26 in the direction of the thickness of the barrier wall 26, and a contact 36 is arranged in the through-hole 27 enabling the electric signal to be transmitted. By bringing a prober 38 arranged on a rotor substrate housed in one space and a prober 42 arranged on a drive substrate 24 housed in another space into contact with the contact 36, the control signal of the drive substrate 22 is transmitted to the rotor substrate 24. |
