Purification of silicon dioxide particles e.g. quartz powder for producing quartz glass components used in semiconductor production or for optics

摘要

Silicon dioxide particles are purified by exposure to a flame (5) formed by burning a fuel gas which contains hydrogen and halogen components. Silicon dioxide particles are purified by exposure to a flame (5) formed by burning a fuel gas which contains a hydrogen component (preferably hydrogen) and a halogen component (preferably molecular halogen) to form volatile reaction products of the impurities. An Independent claim is also included for an apparatus for carrying out the above process.