| 摘要 |
PURPOSE:To shorten detecting time and to improve detecting performance by branching the reflected light of a laser beam from the surface of a material into two systems and detecting the three-dimensional shape of the subject from the ratio of electric signals of both systems. CONSTITUTION:The titled detector is constituted by a laser light source 10, a polarizer 12, a sweeping oscillator 13, focusing lenses 14, 18, 19, an image formation lens 15, a half mirror 17, an optical point position detecting filter 17, a photoelectric converter 20, 21, a divider 24, a processing part 26, a three-dimensional display 27, and a pulse generator 28. In said configuration, a laser beam is diffracted by the polarizer 12, the optical path of the image formation lens 15 which is reflected by the surface of the object is divided into two optical pathes by the half mirror 16 and these are detected as electric signals Z, X respectively. The divider 24 finds Z/X, the processing part 26 outputs each light cutting line signal and the display 27 displays the three-dimensional shape of the object. |
