| 摘要 |
PURPOSE:To measure the particle diameter of minute particles precisely by providing the titled device with an optical system for making laser light incident to a defined vidual field to be measured and a photodetecting system to detect the incident light and scanning the photodetecting system around the vidual field to be measured in the scattering angle direction. CONSTITUTION:Laser light 1 as a light source, the optical system consisting of a slit 10 and a lens 12 and the photodetecting system consisting of a slit 15 and a lens 14 are arranged so that the images of the slits 10, 15 are formed on the vidual field 17 to be measured by the lenses 12, 14 respectively. The photodetecting system is moved by a driving device 16 and scanned around the vidual field 17 to be measured in the scattering angle direction (theta direction). Said method makes it possible to measure the distribution of scattered light in the vidual field to be measured, so that the particle diameter of minute particles 3 existing in an area to be measured can be measured almost correctly. |
