| 摘要 |
PURPOSE:To obtain a high efficiency of light emission in a desired wavelength region and keep the illuminance of a lamp constant, by controlling the temperature of the lamp with a cooling gas heated by a heater to cool the lamp at an optimum temperature in a far ultraviolet-ray exposure device having the Xe-Hg lamp. CONSTITUTION:The temperature of an inert gas 7b which cools a lamp 1 is detected by a detector 8 and is fed back to a temperature controller, and the temperature of the gas 7 is controlled through a gas piping 4 by a heater 6, and a gas 7a whose temperature is controlled is supplied to the lamp 1. |
