| 摘要 |
PURPOSE:To make compact an equipment for manufacturing a target used in vapor deposition or other stage and to easily cool the target, by dividing the target into two or more parts. CONSTITUTION:In the manufacture of a target used in a sputtering system vapor deposition or other stage, a fan-shaped rod is divided into two or more parts, each of the parts is conically cut to form surfaces 11 to be sputtered, and the four cut parts are combined and used as a target. Thus, the target can be manufactured simply at a low cost, and since a method for cooling the target can be simplified, defects such as the formation of blow holes can be prevented. |
