| 摘要 |
PURPOSE:To accurately and rapidly position a circular mask by bringing a notch formed on the periphery of the mask coincident to a notch matching projection of a mask holder and bringing the mask coincident to the direction of the holder. CONSTITUTION:A light quantum generation signal is fed from a control circuit 10, and a light quantum beam 2 is emitted via a lens 3 to a mask 4. The passed beam 2 is emitted via a lens 5 to a wafer 6, which is thus exposed. After finishing the exposure via the lens 3, a signal is fed through a circuit 10 to a load control system 9, and used circular mask 4 is replaced by a new circular mask in a circular mask containing box 7. In the box 7, the mask 4 and the mask holder 12 are contained in such a manner that the mask 4 formed with the notch 14 coincides with the notch matching projection 13. The direction of the mask 4 can be accurately and rapidly operated without mistake merely by bringing the notch 14 coincident to the projection 13. |
