| 摘要 |
PURPOSE:To form a magnetic recording medium which has large thickness, high coercive force, and a high square ratio without decreasing a vapor-deposition speed, by providing vapor deposition sources at >=2 places, and forming a metallic thin film. CONSTITUTION:A high polymer substrate 3 from a payoff shaft 2 runs in contact with a cylinder drum 4 and is taken up by a take-up shaft 1. The vapor deposition sources 9 and 10 are placed on bases 7 and 8 installed under the cylinder drum 4 and used magnetic alloy materials consisting essentially of cobalt and nickel, and they are heated by heating source 11 and 12 to vaporize. Vapor atoms 13 and 14 from the vapor deposition sources 9 and 10 are made incident while their angles of incidence are limited by masks 5 and 6 for limiting the maximum angle of incidence to the high polymer substrate 3. At this time, the maximum angle theta1 of incidence is 90 deg., and the minimum angles of incidence are limited to theta2 and theta3 by the masks 5 and 6. Plural vapor deposition sources are used, so the film thickness of the metallic thin film is increased without decreasing the vapor deposition speed while the square ratio and coercive force are held high. |
