| 摘要 |
<p>An inventive infrared bolometer includes an active matrix level (110) having a substrate (112) provided with an integrated circuit, a pair of connecting terminals (114) and a protective layer (116), a support level (120) having a bridge (122) and a pair of conduction lines (124) formed on top of the bridge (122), wherein the bridge (122) includes a pair of anchor portions (122a), a pair of leg portions (122b) and an elevated portion (122c), an absorption level (130) having a bolometer element (136) surrounded by an absorber (132), a reflective layer (134) located at bottom of the absorber (132) and an IR absorber coating (138) placed on top of the absorber (132), and a pair of posts (140) placed between the absorption level (130) and the support level (120), wherein a top portion of each of the posts (140) is attached on the center portion of the absorber (132) and a bottom portion thereof is attached on the elevated portion of the bridge (122). The absorption level (130) is formed with a groove (201) along and near its edge so as to prevent stresses accumulated in absorption level from being relieved.</p> |
