| 摘要 |
PURPOSE:To obtain the wafer aligner, manufacturing cost thereof is low, which does not damage the wafers and which is excellent in workability and treatment capacity, by O-F aligning all wafers 2 of a cartridge jig through several turning operation of a handle. CONSTITUTION:The cartridge jig 1 receiving the wafers 2 is inserted into a jig receiver 5 brought to a vertically erected state under the state in which the handle 19 is rotated upward so as not to contact. When the jig receiver 5 is turned at 180 deg. and the cartridge jig 1 is reversed, all wafers 2 in the cartridge jig 1 brought to an inverted state are placed on an aligning bar 18. Consequently, when the handle 19 is turned and the aligning bar 18 is rotated, each wafer 2 is turned. The wafers 2 are turned during the time when fringe sections drawing curves are in contact with the aligning bar 18, but revolution is reduced when rectilinear O-Fs 4 are brought into contact with the bar 18, and the wafers 2 are not rotated even when the aligning bar 18 is turned when the O-Fs 4 are brought close to approximately horizontality and brought into contact with a guide bar 20. Accordingly, when the handle 19 is turned predetermined times, the O-Fs 4 of all wafers 2 are positioned at lower edges, and O-F 4 alignment is completed. |
