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发明名称
APERTURED MASK FOR CREATING PATTERNED SURFACES AND PROCESS FOR ITS MANUFACTURE
摘要
申请公布号
DE3065255(D1)
申请公布日期
1983.11.17
申请号
DE19803065255
申请日期
1980.05.09
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
BOHLEN, HARALD;ENGELKE, HELMUT, DR.;GRESCHNER, JOHANN, DR.;NEHMIZ, PETER, DR.
分类号
G03F1/00;(IPC1-7):G03F1/00
主分类号
G03F1/00
代理机构
代理人
主权项
地址
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