| 摘要 |
PURPOSE:To permit the working with a high accuracy of 1 micron or less by installing, onto a grinder, a measuring means for an article to be worked, installation posture controlling means by use of the output of the above-mentioned means, load compensating means for obtaining a constant ascent and descent load, and a static and dynamic pressure composite guide on the ascent and descent surfaces of a tool installation head. CONSTITUTION:A rotary table 6 is installed rotation-controllably, on a worked-article feeding base 4 which is transferred by a feeding screw shaft 3, and a worked article holding jig 7 is installed tilt-controllably in the upper part of the rotary table 6, and an article W to be worked is held onto the tool 7 through vacuum absorption. On the table 6, an X-ray measuring means R and a control means which operates a control means 13 by the signals transmitted from a counting tube 12 and allows the direction of shaft of the worked article W to coincide with a standard direction are installed. When the frictional force generated between a head 54 and guide surfaces 52 and 53 during the head 54 rises and lowers, and a resistive force due to external force are generated, and a shaft 58 loaded, the pressure variation signal in the bearing chambers 63 and 64 operates a servo valve 69 to shift the head 54 in the direction toward vanishing of variation, and the load is compensated, and each pressure in the bearing chambers 63 and 64 is controlled to a same value. |
