| 摘要 |
PURPOSE:To enable the evaporation of an evaporating source at relatively low temp. by installing another crucible contg. the vapor source on the inside of the crucible wound with a heater. CONSTITUTION:The evaporation temps. of Ga and As differ in the case of incorporating Ga and As respectively into a crucible 11, heating the same with a heater wire 2 so as to evaporate and grow GaAs. Therefore, the As evaporating source 15 having the lower evaporation temp. is put in another crucible 16 which is then installed in the crucible 11. The temp. difference between the outside crucible 11 and the inside crucible 16 is determined by the material and structure of both crucibles 11, 16. The temps. of both crucibles 11, 16 are controlled with good accuracy, and Ga and As are evaporated easily with specified vapor pressure. |
