| 摘要 |
PURPOSE:To form easily a protecting film of high hardness with high reproducibility, by forming a metallic reflecting film on the surface of a disk of a digital signal and then oxidizing or nitriding the surface of said reflecting film. CONSTITUTION:For a recording/reproducing disk such as a video disk, etc., a metallic reflecting film 5 of Al, etc. is formed on the surface of a digital signal on a transparent disk board 4 by a sputtering process, etc. Then the O2 or N2 gas is led into the same device to generate an Al2O3 or AlN film on the surface of the film 5 to obtain a protecting film 10. In such a way, the film 10 is formed consecutively after the film 5. Furthermore, the film 10 has high hardness and excellent resistance, moisture resistance, etc. This process ensures a disk of high reliability. |
