| 摘要 |
PURPOSE:To facilitate the control of reaction temperature, to prevent blocking trouble and to produce silicon hexachloride in high yield and efficiency, by reacting metallic Si or Si alloy with chlorine in a specific reactor. CONSTITUTION:A vibration reactor is composed of a reactor 1 having a partition plate 27 in vapor phase reaction zone and placed on a vibrator 2 such as an unequilibrated weight vibrator having a vibration frequency of 400-3,600rpm and amplitude of 0.5-30mm. The reactor is connected to a silicon raw material feeding line 7, a chlorine feeding line 8, etc., and a produced gas outlet line 21 through flexible tubes. Metallic Si or an Si alloy 4 (e.g. ferrosilicon) having an Si content of >=30wt% and particle size of 5-300 mesh is supplied through the feeding line 7 to the reactor 1 until 20-80vol% of the reactor is filled with the material. Chlorine is supplied through the feeding line 8 to the reactor optionally in a state diluted with N2 supplied through a dilution gas feed line 9. The reactor is vibrated at a high frequency at 100-500 deg.C and, at the same time, gas stream is refluxed with the partition plate 27 to enable sufficient contact of the Si raw material with chlorine and effect uniform reaction of the components at high conversion. The produced gas is cooled through the outlet line 21 and cooling pipe 23 to obtain liquid silicon hexachloride 25.
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