APPARATUS FOR MEASURING SEMICONDUCTOR SURFACE POTENTIAL AND IMPURITY CONCENTRATION,申请号EP19810102747-传众专利搜索

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发明名称	APPARATUS FOR MEASURING SEMICONDUCTOR SURFACE POTENTIAL AND IMPURITY CONCENTRATION
摘要
申请公布号	EP0040691(B1)	申请公布日期	1983.11.16
申请号	EP19810102747	申请日期	1981.04.10
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	CORCORAN, RICHARD ALAN;KEENAN, WILLIAM ANDREW;MICHAELIDES, DEMETRIOS;YUN, BOB HONG
分类号	G01N27/00;G01N27/04;G01R31/26;H01L21/66;(IPC1-7):01R31/26	主分类号	G01N27/00
代理机构		代理人
主权项
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