| 摘要 |
PURPOSE:To contrive reduction of labor required for changeover of probe cards as well as to perform the inspection of semiconductor elements continuously by a method wherein a device is constituted in such a manner that a probe card conforming to the prescribed conditions is automatically selected from two or more probe cards. CONSTITUTION:The information pertaining to the kind of wafers to be inspected by probe cards 51-54 are sent to a driving control mechanism 11 through the intermediaries of a signal lines 13 and 15 and a probe 12, and the rotation of a supporting member 4 is stopped at the point of time when the cards 51-54, to be selected by rotation of a rotating shaft 6, are positioned under the adapter 3 to be used for probe cards. Then, the shaft 6 and the supporting member 4 are raised, and the cards 51-54 are fixed at the adapter 3 through the intermediary of a contact pin 7. Subsequently, the probe 8 of the selected cards 51-54 and the wafer 9 are contacted each other by raising the wafer stage 10 having the wafer 9, an electric signal for inspection is sent from the adapter 3, thereby enabling to perform the inspection on the semiconductor element 9. |
