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发明名称
摘要
申请公布号
JPS5850958(B2)
申请公布日期
1983.11.14
申请号
JP19800124512
申请日期
1980.09.10
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
KOKUBU YOSHIHIRO;WATANABE MASAYUKI;KOJIMA MASAKATSU
分类号
C04B41/87;C30B15/24;C30B15/34;C30B27/02;C30B29/40;H01L21/208
主分类号
C04B41/87
代理机构
代理人
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