| 摘要 |
PURPOSE:To perform the cooling of a target, by installing the shaft body of a movable point rotary joint on the center axis of a target installing disk as one body, while coupling it by means of a cooling pipe from a fixed point rotary joint via the movable point rotary joint. CONSTITUTION:A target chamber 9 is installed in front of the main body 7 of an ion implanting device while an ion implantation chamber is installed inside the target chamber 9. A circular disk 33 is supported at the upside of a shaft 29 and rotated then rectilinearly moved. In addition, an ion implanting target 36 is installed in an ion implanting target installation part 34 of the disk 33. A movable point rotary joint 43 is installed on the shaft 29 as one body while a fixed rotary joint 52 is as well installed in the inner part of a chamber cover 14, and also an intermediate point rotary joint 47 is installed between joints 43 and 52. Each interspace between joints 43, 47 and 47 and 52 is coupled with outward side cooling pipes 58b, 59b and inward side cooling pipes 58c, 59c, and then a cooling medium is fed from outside, so that the target 36 can be effectively cooled. |
