发明名称 SOLID STATE COLOR IMAGER AND METHOD OF MANUFACTURING THE SAME
摘要 A plurality of color filters (1, 2) are disposed on a semiconductor body for a solid-state imager including a plurality of photosensitive regions (5, 6, 7), and a filter of a third color is constructed by the overlapping between the filter members (1, 2) of a first color and a second color. The filter members are formed by a photographic exposure process. One of the filter members (1) which has a spectral transmittance substantially transmitting the light used for the exposure for use in forming the filter members (1, 2) is arranged as a lower layer closer to a substrate of the semiconductor body. When the upper filter (2) is formed, therefore, the lower filter (1) has no substantial effect on the exposure light reflected from the semiconductor body, giving a better spectral characteristic to the upper filter.
申请公布号 DE3065210(D1) 申请公布日期 1983.11.10
申请号 DE19803065210 申请日期 1980.12.09
申请人 HITACHI, LTD. 发明人 SASANO, AKIRA;NAKANO, TOSHIO;TSUTSUI, KEN;HASHIMOTO, MICHIAKI;KANEKO, TADAO;TANIGUCHI, YOSHIO;MATSUMARU, HARUO;IZUMI, AKIYA
分类号 H04N9/07;H01L27/14;H01L27/146;(IPC1-7):H01L31/02 主分类号 H04N9/07
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