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经营范围
发明名称
WAERMEBEHANDLUNGSGERAET FUER HALBLEITERPLAETTCHEN
摘要
申请公布号
DE3315003(A1)
申请公布日期
1983.11.10
申请号
DE19833315003
申请日期
1983.04.26
申请人
GCA CORP.
发明人
JEROME WEBER,T.
分类号
H01L21/677;C30B33/00;H01L21/00;H01L21/22;(IPC1-7):F26B3/30;C30B35/00
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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