发明名称 |
Real-time component monitoring and replenishment system for multicomponent fluids |
摘要 |
A multicomponent fluid composition monitoring and compositional control system, in which a component analysis is effected by titration or other analytical procedure, for one or more components of interest, and a computational means then is employed to determine and responsively adjust the relative amount or proportion of the one or more components in the multicomponent fluid composition, to maintain a predetermined compositional character of the multicomponent fluid composition. The system is usefully employed in semiconductor manufacturing photoresist and post-etch residue removal, in which the cleaning medium is a semi-aqueous solvent composition, and water is the monitored and responsively adjusted component. |
申请公布号 |
AU2002330225(A1) |
申请公布日期 |
2003.05.12 |
申请号 |
AU20020330225 |
申请日期 |
2002.10.04 |
申请人 |
ADVANCED TECHNOLOGY MATERIALS, INC. |
发明人 |
JOSEPH W. EVANS;TODD AYCOCK;RUSSELL STEVENS;THOMAS KLOFFENSTEIN |
分类号 |
G03F7/42;G05D11/13;G05D21/02;H01L21/00;H01L21/027;H01L21/304;H01L21/306;(IPC1-7):E03B1/00 |
主分类号 |
G03F7/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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