| 摘要 |
PROBLEM TO BE SOLVED: To perform chemical treatment while suppressing the exposure of the liquid face of a chemical to air. SOLUTION: A cover 3 is floating on a chemical 5 which is stored in a chemical tank 1, and a tape board 7 is passed through opening parts 4a and 4b, so that the tape board 7 is dipped into the chemical 5 via the cover 3. While the tape board 7 is transported via rollers 6a to 6d in a state where the tape board 7 is dipped into the chemical 5, the tape substrate 7 is subjected to chemical treatment. COPYRIGHT: (C)2005,JPO&NCIPI
|
