| 摘要 |
PURPOSE:To relate directly the change of the position of an incident light and a photocurrent characteristic to each other, by forming deformed parts in end parts of a sub-region near a main region, where the position of the incident light is detected, to enhance the carrier gathering capability more than the other parts. CONSTITUTION:Deformed parts 26b and 25b projecting toward a locus 12 of an incident spot light are formed in an end part 26a of the second sub-region 26 near the first main region 23 and an end part 25a of the first sub-region 25 near the second main region 24 in an optical position sensor 21. In accordance with the intensity and the position of incidence of the incident spot light 11, photocurrents are led out from the part between the first electrode 28 and the third electrode 30 and the part between the second electrode 29 and the third electrode 30. |
