| 发明名称 |
METHOD OF PICKING UP CRYSTAL DISKS |
| 摘要 |
<p>A process and apparatus for supporting crystalline wafers utilizing the suction effect of flowing gas on the crystalline wafers. An almost point-like support of the crystalline wafer is achieved. Furthermore, the invention relates to a holding tool for carrying out the process, which tool has at the center of the holding face, a point-like projection.</p> |
| 申请公布号 |
EP0048995(B1) |
申请公布日期 |
1983.11.09 |
| 申请号 |
EP19810107773 |
申请日期 |
1981.09.30 |
| 申请人 |
WACKER-CHEMITRONIC GESELLSCHAFT FUR ELEKTRONIK-GRUNDSTOFFE MBH |
发明人 |
SCHIELE, BERND, DR. DIPL.-ING.;NIEDERMEIER, JOHANN |
| 分类号 |
B23Q3/08;B23B23/02;B28D5/00;B28D5/02;B65G47/91;H01L21/683;(IPC1-7):28D7/04;01L21/68;65G47/91 |
主分类号 |
B23Q3/08 |
| 代理机构 |
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代理人 |
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