| 摘要 |
PURPOSE:To enhance working efficiency, such as formation of an electrode film, and to thin an element, by applying a polymer film to be used as a dielectric material onto an opening to be formed on a substrate and attaching it continuously to the surface of the substrate. CONSTITUTION:An opening 2 and lead terminals 3, 4 are formed on a 0.1-0.2mm. thin substrate 1, it is immersed except the part of a connector 1a into a polymer paste, then, taken up and dried to obtain the substrate 1 to both sides of which polymer films 5 are applied and onto the opening of which a flat polymer film 5a is formed by surface tension. Electrode films 6, 7 and wiring films 6a, 7a are vapor-deposited onto both sides of said polymer film to complete a humidity sensitive element. This humidity sensor changes a water content in its polymer films 5 in accordance with the humidity of the environment where the sensor is located, change of the dielectric constant generates pulse width signals in accordance with the capacity values of the electrodefilms 6, 7 and resistance connecting to the outside, thus permitting measurement of humidity by integrating the signals and calculating the obtd. value. |
