| 摘要 |
PURPOSE:To irradiate desired shaping beams onto a sample by predetermined irradiation electron density at all times, and to form an accurate element onto the sample by setting up a means deflecting a pair of electron beams between an electron-beam generating source and a shaping slit at a first stage while providing a means measuring the current value of electron beams after passing a shaping slit at a second stage. CONSTITUTION:A computer 12 transmits the quantity of the desired shaping beams 18 deflected to an amplifier 13 so that a line dividing the long side of the desired shaping beams 18 into two equal parts passes through the center of electron density curves 17, and an irradiation electron deflector 2 deflects electron beams from the electron-beam generating source 1 only by the quantity on the basis of its output. Electron beams deflected are irradiated to the shaping slit 4 at the first stage, and reach on a shaping deflector 5. The second shaping beams 21 are irradiated to a sample base 11 through a projection lens 8 and a positioning deflector 9 through the rectangular hole 19 of the shaping slit 7, and the current value is measured by a current measuring instrument 15. The computer 12 applies correction deflection to the shaping deflector 5 up to reference electron irradiation density, and exposes the desired position of the sample 10 at a point of time when beams reach the desired shaping beams 18 agreeing with reference irradiation electron density. |
