| 摘要 |
PURPOSE:To make it possible to measure the line width, i.e. the distance between the first and the last edges of a line, by providing a method having the steps of selecting the distance of scanning by a light spot in accordance with the line width to be measured, scanning this distance across the line, and summing the distances between adjacent pulses obtained tdhroughout the scanning. CONSTITUTION:The scanning distance of a light spot 1 is set to correspond to the width of the line of a circuit pattern 2. A value X inputted by a digital switch 8 is continuously compared with the content of a counter 6, by means of a comparator 7. Until the comparators 7 produces a coincidence signal, the distances (a), (b) and (c) between pulse signals 2a'' and 2d'' obtained through a detector 3 and a differentiation circuit 4 are stored in a memory through a sampling circuit 10. Simultaneously with the outputting of the coincidence signal from the comparator 7, an operation circuit 11 makes a computation to determine the value of SIGMA=a+b+c and displays or prints the result as the measured line width of the circuit pattern 2. |
