| 摘要 |
PURPOSE:To increase the output of soft X-rays without enlarging the distance between a generating source of X-rays and a base plate, by installing an electron gun at a position away from a rotating anticathode and connecting the interspace with a pipe, while disposing an electron lens on the pipe. CONSTITUTION:An electron gun 31 is installed at a position away from a rotating anticathode 28 and the interspace between them is connected with a pipe 34 while an electron lens 35 is disposed on the pipe 34. In this constitution, the electron beam produced by the electron gun 31 is compensated so as to cause the required diameter to be converged on a radiate surface 29 of the cathode 28, then passes through the pipe 34 and is radiated on the radiate surface 29. The soft X-rays produced on the radiate surface 29 are discharged and radiated on a base plate 4 through a mask 3. With a soft X-ray generator constituted like this, in a bid to make the output of the electron gun 31 yet larger, if the caliber of a cathode 22 increases in size, there is no necessary to enlarge the interval between the generating source of X-rays and the base plate 4. Therefore, a portion for an increase in the output of the electron gun 31 is substituted for a portion for improvement in the ray focusing density of soft X-rays to be radiated on the base plate 4 as it is. |
