| 摘要 |
PURPOSE:To reduce wasteful cooling water as much as possible by controlling the flow rate of coolant in response to the loss of producing an element and water temperature. CONSTITUTION:A load is applied to a semiconductor element 1, the quantity of heat is increased, with the result that the temperature difference of the parts between an inlet 3 and an outlet 3' becomes large. This temperature difference is detected by a temperature detector 5, while the coolant amount of the inlet part is detected by a temperature detector 4, necessary water amount determined by both functions is determined by a controller 6, and the rotating speed of a pump 7 is set to the prescribed value. The cooling of the semiconductor element is sufficiently performed with the water amount of necessary minimum by the water-cooled type, thereby reducing the amount of cooling water. |
