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发明名称
SHEET-LIKE PROBE, PROCESS FOR PRODUCING THE SAME AND ITS APPLICATION
摘要
申请公布号
EP1624309(B1)
申请公布日期
2007.09.19
申请号
EP20040732418
申请日期
2004.05.12
申请人
JSR CORPORATION
发明人
INOUE, KAZUO;SATO, KATSUMI
分类号
G01R1/073;G01R3/00
主分类号
G01R1/073
代理机构
代理人
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地址
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