Micro-electromechanical sensor device

摘要

A sensor device (100) comprises a holding body (10), at least one deflectable sensor element (20) fixed to the holding body (10), and a sensor array (30) with a plurality of sensitive layers (31) arranged on a surface (21) of the at least one sensor element (20), wherein each of the sensitive layers (31) is adapted to couple at least one probe substance to be sensed, wherein the at least one sensor element (20) has a spring constant below 5 N/m. Furthermore, a measuring device comprising the sensor device and a method of investigating a sample for sensing at least one probe molecule in the sample are described.