| 摘要 |
PURPOSE:To accurately position a wafer with a simple structure by using as a reference for setting the position the guide end face of a drive roller. CONSTITUTION:A force for always pressing a wafer 1 to the drive roller 3 side is applied to rollers 6, 7, which freely rotate as the wafer 1 rotates. The end faces 5, 10 are disposed in the same line, and the roller 3 is disposed slightly outside the line. Since the wafer 1 is circular, it rotates without contact with guides 4, 9. When the wafer 1 rotates and the part of an orientation flat 2 make contact with the roller 3, the wafer 1 is, urged by the rollers 6, 7, contacted with the end of the guide 9 so that the wafer 1 which is braked by the rotation of the wafer 1 by the frictional force continues rotating. When the end faces 5, 10 are contacted with the flat 2, the rotation of the wafer 1 can be effectively stopped. |
