| 摘要 |
PURPOSE:To prepare high-purity silicon by continuous and safe operation economically, by making a gas to prevent silicon from precipitating flow into the vicinity of an inner wall of a reactor for depositing silicon on fine particles of high-purity silicon forming a fluidized bed. CONSTITUTION:In a production unit for high-purity silicon consisting of the fluidized bed reactor 1 and the electric furnace 7, the seed silicon fine particles 8 are supplied from the feed pipe 3 to it, a halosilane gas such as trichlorosilane, etc. and hydrogen gas are fed from the reaction gas feed pipe 4, they are heated about 800-1,300 deg.C by the electric furnace 7, and silicon is precipitated on the surfaces of the fluidized silicon articles 8, to form high-purity silicon granules. The porous inner cyclinder 9 is set in the reaction column 2 of the reactor 1, a gas to prevent silicon from precipitating or to control it, introduced from the gas feed pipe 6 for preventing precipitation, is sent from the pore parts 10 of the cylinder 9 to the reaction chamber, so that silicon is prevented from being deposited on the inner wall of the inner cylinder 9. |
