SEMICONDUCTOR MANUFACTURING EQUIPMENT INCLUDING WAFER TRANSFER ROBOT AND METHOD FOR CONTROLLING OF THE SAME

摘要

Semiconductor manufacturing equipment having a wafer transfer robot and a control method thereof are provided to reduce the wafer transfer time and increase productivity of the equipment by variably adjusting the speed of the wafer transfer robot according to the presence of wafers to be carried by the wafer transfer robot. Semiconductor manufacturing equipment comprises at least one wafer transfer robot, and a control unit for variably modifying the transfer speed of the wafer transfer robot according to the presence of wafers to be carried by the robot. A control method of semiconductor manufacturing equipment having a wafer transfer robot comprises the steps of: discriminating if a wafer is mounted in a wafer transfer robot or not(S300); controlling the wafer transfer robot to move at a first speed, if the wafer is mounted(S310); and controlling the wafer transfer robot to move at a second speed which is faster than the first speed, if the wafer is not mounted(S320).