| 摘要 |
PURPOSE:To enable to set bonding load easily and precisely by a method wherein bonding load is set by controlling the quantity of a gap between a tool lifter arm and a tool arm. CONSTITUTION:The tool lifter arm 4 is supported on an X-Y table 1 through a supporting base 3 and a pivot 2, and moreover the tool arm 7 having a capillary 8 is fixed through a plate spring 5. The lifter arm 4 is shaken by a linear motor 19, and transfers the tool arm 7 through an initial position setting mechanism 13 having a tension spring 12 to perform bonding. A gap sensor 27 is equipped to the lifter arm 4, and relation between bonding load and gap width is measured previously. When bonding is to be performed, bonding load is fixed to a constant by controlling gap width to a constant. |
