| 摘要 |
PURPOSE:To facilitate the automatic installation and removal of a substrate, by maintaining the substrate in horizontal condition and without cramping it while a rotary disc is stopped. CONSTITUTION:While a rotary disc 7 is stopped, it is held horizontally, so a movable pedestal 9 is held horizontally on the horizontal rotary disc completely apart from a fixed frame 8. When a substrate 20 is inserted into the inside of the substrate locating means, said substrate 20 is disposed as if the lid were put on the opening surface of a concave part 15. When the rotary disc is rotated, as it is horizontal with the predetermined number of revolution, the centrifugal force applied to the movable pedestal is increased, the force component in the direction perpendicular to a straight line which connects the rotary shaft 18 to the center of gravity of the movable pedestal is increased, so the movable pedestal is lifted by turning around rotary shaft and brought into contact with a fixed frame 8 located above. Also, a piston 11 projecting from the movable pedestal is pushed into a cylinder 12 by means of a spring 14, the gas which is packed inside the movable pedestal flows via a passage pipe 17 into the concave part 15 and lifts a rubber-film 16, then the substrate 20 is pushed onto the facing adjacent frame. |
