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发明名称
ELECTRON BEAM SCANNING DEVICE
摘要
申请公布号
GB8325829(D0)
申请公布日期
1983.10.26
申请号
GB19830025829
申请日期
1983.09.27
申请人
JEOL LTD
发明人
分类号
H01J37/09;H01J37/04;H01J37/28;H01J37/302;(IPC1-7):H01J37/30
主分类号
H01J37/09
代理机构
代理人
主权项
地址
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